December 8, 2021

CHICAGO PIXELS

SEMICONDUCTOR RESEARCH CENTER

Epiluvac supplies CVD reactors to Polish institute

Epiluvac AB of Lund, Sweden – which was founded in 2013 and produces silicon carbide (SiC) chemical vapour deposition (CVD) systems used in power device research – has received the first order for two new CVD systems in a double configuration. Designed with Epiluvac ER3 reactors for 8-inch wafer epitaxy of silicon carbide (SiC) and gallium nitride (GaN), the CVD systems will be used by Lukasiewicz Research Network Institute of Microelectronics and Photonics in Warsaw, Poland, for R&D on new materials technology…