December 5, 2021

CHICAGO PIXELS

SEMICONDUCTOR RESEARCH CENTER

Question regarding semiconductor manufacturing technology

Hi everyone!

I have a question regarding semiconductor manufacturing technology. I was wondering what the most popular measurement methods to find the thickness and composition of thin films were. I hope to do a presentation on the most popular ones but I am kind of overwhelmed by all the results I am finding out there. So far I have found these, idk if anybody knows if these are good or not or could tell me something about em:

-i) Profilometry measurement

-ii) Atomic Force Microscope (AFM)

-iii) Fluorescence (XRF)

-iv) Near-field scanning optical microscopy (NSOM)

-v) Ellipsometry

Thank you!

submitted by /u/Bart0wnz
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