At the 2021 VLSI Technology Symposium, Imec presented on Ruthenium (Ru) and Molybdenum (Mo) as alternate Word Line (WL) materials...
IMEC
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FinFETs devices are reaching their limits for scaling. Horizontal Nanosheets (HNS) are a type of Gate All Around (GAA) device...
At the 2021 Symposium on VLSI Technology and Circuits in June a short course was held on “Advanced Process and...
